● Ultra clean for Semiconductor process;
● High Ozone Concentration up to 400g/m3;
● High Flow up to 94 slm @ 210g/m3;
● Long lifetime discharging Cell;
● Ozone gas analyzer intergrated;
● Gas control system inside;
● Close loop Ozone concentration controlling system;
● SEMI-S2 and CE Certification;
Copyright © 蘇州晶拓半導(dǎo)體科技有限公司 備案號:蘇ICP備18057343號-1
技術(shù)支持:中谷網(wǎng)絡(luò)
管理員
該內(nèi)容暫無評論