● 超純的臭氧氣體：極低的金屬雜質(zhì)含量，低至ppt級別；

● Ultra clean Ozone gas: Extremely low level metal contaminations, low to ppt level;

● 高可靠性與重復(fù)性；

● High reliability and Excellent repeatability;

● 雙面放電雙面冷卻技術(shù)，提高放電效率；

● Double side discharging and cooling technology，improve discharging efficiency;

● 高臭氧氣體濃度，可達350g/m3以上；

● High ozone concentration, ≥350g/m3;

● 高氣體流通壓力，可達3bar以上；

● High delivery Ozone pressure; up to 3 bar;

● 流量可達36slm以上，適合于最新的CVD系統(tǒng)；

● High flow up to 36slm, applied to newest CVD system;